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Optimum Design of PolyMUMPs Based Thermoelectric Generator Chip
Sawires E.F., , Eladawy M.I.
Published in Institute of Electrical and Electronics Engineers Inc.
2018
Pages: 1312 - 1316
Abstract
In this work, a design of poly Multi-User MEMS Processes, or PolyMUMPs based micro-thermoelectric generator (μ TEG) with cost effective is presented. The presented 3-D numerical simulation model is verified with published experiment in previous work results by another author. The simulation results show that the output power at 1.3 K of temperature difference between the hot and cold sides of PolyMUMPs-μ TEG device with the heat sink effect at optimal dimension is 16.56μ W. © 2018 IEEE.