Abstract
Analytical, physically-based, models for the threshold voltage and the subthreshold swing of undoped cylindrical gate all around (GAA) MOSFETs have been derived at low drain-source voltage based on an analytical solution of the two-dimensional (2-D) Poisson equation (in cylindrical coordinates) with the mobile charge term included. The new model has been verified by comparison with 3-D numerical simulations of devices with different channel lengths and thickness; the observed agreement with the numerical simulations is quite good.
| Original language | English |
|---|---|
| Pages (from-to) | 805-812 |
| Number of pages | 8 |
| Journal | Solid-State Electronics |
| Volume | 50 |
| Issue number | 5 |
| DOIs | |
| State | Published - May 2006 |
| Externally published | Yes |
Keywords
- Device modeling
- Downscaling
- Gate all around
- MOSFET
- Subthreshold swing
- Surrounding-gate MOSFET
- Threshold voltage
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