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Three-dimensional (3-D) analytical modeling of the threshold voltage, DIBL and subthreshold swing of cylindrical Gate All Around MOSFETs

  • Universidad Rovira i Virgili
  • LAAS / CNRS

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We present 3-D analytical, scalable models for the threshold voltage roll-off, the subthreshold swing and the DIBL of undoped cylindrical Gate All Around (GAA) MOSFETs. The models are based on an analytical solution of the 3-D Poisson equation. Device geometry dependences are inherent to the models. Excellent agreement has been obtained with 3-D numerical simulations and experimental results.

Original languageEnglish
Title of host publicationNanoscaled Semiconductor-on-Insulator Structures and Devices
Pages363-368
Number of pages6
StatePublished - 2006
Externally publishedYes

Publication series

NameNATO Security through Science Series B: Physics and Biophysics
ISSN (Print)1871-465X

Keywords

  • 3-D modeling
  • Gate All Around MOSFET
  • Scalability
  • Short-channel effects

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