The effect of electrode geometry on the stability of a liquid metal ion emitter

G. L.R. Mair; Ch Akhmadaliev; L. Bischoff; Th Ganetsos; C. J. Aidinis; E. A. Anagnostakis

doi:10.1016/j.nimb.2003.10.011

The effect of electrode geometry on the stability of a liquid metal ion emitter

G. L.R. Mair
, Ch Akhmadaliev
, L. Bischoff
, Th Ganetsos
, C. J. Aidinis
, E. A. Anagnostakis

National and Kapodistrian University of Athens
Helmholtz-Zentrum Dresden-Rossendorf
Hellenic Army Academy

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

The effect on source stability of removing the extractor electrode from a liquid metal ion source system has been investigated. The noise of the current and the corresponding frequency spectra were carefully studied. The findings in the two cases, i.e. with and without an extractor electrode, were found to be very different. The explanation for this is given in terms of different droplet emission mechanisms being operative in the two cases. The liquid emitter used was a AuGeSi alloy. Focused Ge and Si ion beams are important for microelectronics applications. Thus, an understanding of the mechanisms that lead to source instability is essential.

Original language	English
Pages (from-to)	347-351
Number of pages	5
Journal	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume	217
Issue number	2
DOIs	https://doi.org/10.1016/j.nimb.2003.10.011
State	Published - Apr 2004
Externally published	Yes

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title = "The effect of electrode geometry on the stability of a liquid metal ion emitter",

abstract = "The effect on source stability of removing the extractor electrode from a liquid metal ion source system has been investigated. The noise of the current and the corresponding frequency spectra were carefully studied. The findings in the two cases, i.e. with and without an extractor electrode, were found to be very different. The explanation for this is given in terms of different droplet emission mechanisms being operative in the two cases. The liquid emitter used was a AuGeSi alloy. Focused Ge and Si ion beams are important for microelectronics applications. Thus, an understanding of the mechanisms that lead to source instability is essential.",

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T1 - The effect of electrode geometry on the stability of a liquid metal ion emitter

AU - Mair, G. L.R.

AU - Akhmadaliev, Ch

AU - Bischoff, L.

AU - Ganetsos, Th

AU - Aidinis, C. J.

AU - Anagnostakis, E. A.

PY - 2004/4

Y1 - 2004/4

N2 - The effect on source stability of removing the extractor electrode from a liquid metal ion source system has been investigated. The noise of the current and the corresponding frequency spectra were carefully studied. The findings in the two cases, i.e. with and without an extractor electrode, were found to be very different. The explanation for this is given in terms of different droplet emission mechanisms being operative in the two cases. The liquid emitter used was a AuGeSi alloy. Focused Ge and Si ion beams are important for microelectronics applications. Thus, an understanding of the mechanisms that lead to source instability is essential.

AB - The effect on source stability of removing the extractor electrode from a liquid metal ion source system has been investigated. The noise of the current and the corresponding frequency spectra were carefully studied. The findings in the two cases, i.e. with and without an extractor electrode, were found to be very different. The explanation for this is given in terms of different droplet emission mechanisms being operative in the two cases. The liquid emitter used was a AuGeSi alloy. Focused Ge and Si ion beams are important for microelectronics applications. Thus, an understanding of the mechanisms that lead to source instability is essential.

UR - https://www.scopus.com/pages/publications/1342308330

U2 - 10.1016/j.nimb.2003.10.011

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SP - 347

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JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

IS - 2

ER -

The effect of electrode geometry on the stability of a liquid metal ion emitter

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