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Study of a liquid metal field ion emitter for the production of Si ions

  • C. J. Aidinis
  • , L. Bischoff
  • , G. L.R. Mair
  • , C. A. Londos
  • , Th Ganetsos
  • , C. Akhmadaliev
  • National and Kapodistrian University of Athens
  • Helmholtz-Zentrum Dresden-Rossendorf

Research output: Contribution to journalConference articlepeer-review

6 Scopus citations

Abstract

The study of AuSi liquid metal alloy ion sources (LMAIs) for the production of Si ions is not new. However, the present work encompasses in a concise form almost all fundamental aspects of source behaviour, in particular of a Au 82Si18 source. A key finding, manifested in the behaviour of the ion extraction voltage with temperature, is the abnormal behaviour of the surface tension coefficient of the alloy with temperature. An important deduction, however, concerns the mechanisms responsible for the creation of doubly charged ions: reasons of self-consistency suggest that while Si ++ is directly field-evaporated, Au++ must form by the post-ionization of Au+.

Original languageEnglish
Pages (from-to)116-119
Number of pages4
JournalMicroelectronic Engineering
Volume73-74
DOIs
StatePublished - Jun 2004
Externally publishedYes
EventMicro and Nano Engineering 2003 - Cambridge, United Kingdom
Duration: 22 Sep 200325 Sep 2003

Keywords

  • Liquid metal ion sources
  • Silicon ion emission

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