On the temperature dependence of the mass spectra of AuGe and AuGeSi liquid metal alloy ion sources

L. Bischoff; W. Pilz; Th Ganetsos; Ch Akhmadaliev; C. J. Aidinis; C. A. Londos

doi:10.1088/1742-6596/10/1/053

On the temperature dependence of the mass spectra of AuGe and AuGeSi liquid metal alloy ion sources

L. Bischoff
, W. Pilz
, Th Ganetsos
, Ch Akhmadaliev
, C. J. Aidinis
, C. A. Londos

Helmholtz-Zentrum Dresden-Rossendorf
TEI of Lamia
National and Kapodistrian University of Athens

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Abstract

This reports on an extensive study of the characteristics of AuGe and AuGeSi liquid metal alloy ion sources as a model system for new semiconductor compatible FIB sources. Such characteristics include ion beam mass spectra. A careful investigation has been undertaken where the emitter temperature is the main variable parameter. This work concerns the temperature dependence of the mass spectra of two needle-type liquid metal alloy ion sources (LMAISs), namely Au₇₇Ge₁₄Si₉ (T_m ≤ 364°C) and Au₇₃Ge₂₇ (T_m ≤ 365°C). The sources are important for producing SiGe implanted layers. The experimental results, in conjunction with existing theories, strongly points towards the co-existence of two mechanisms for the emission of doubly-charged monomer ions: direct filed-evaporation and post-ionisation.

Original language	English
Pages (from-to)	214-217
Number of pages	4
Journal	Journal of Physics: Conference Series
Volume	10
Issue number	1
DOIs	https://doi.org/10.1088/1742-6596/10/1/053
State	Published - 1 Jan 2005
Externally published	Yes

Access to Document

10.1088/1742-6596/10/1/053

Cite this

@article{ef801677ce214cd1940f70da835f1754,

title = "On the temperature dependence of the mass spectra of AuGe and AuGeSi liquid metal alloy ion sources",

abstract = "This reports on an extensive study of the characteristics of AuGe and AuGeSi liquid metal alloy ion sources as a model system for new semiconductor compatible FIB sources. Such characteristics include ion beam mass spectra. A careful investigation has been undertaken where the emitter temperature is the main variable parameter. This work concerns the temperature dependence of the mass spectra of two needle-type liquid metal alloy ion sources (LMAISs), namely Au77Ge14Si9 (Tm ≤ 364°C) and Au73Ge27 (Tm ≤ 365°C). The sources are important for producing SiGe implanted layers. The experimental results, in conjunction with existing theories, strongly points towards the co-existence of two mechanisms for the emission of doubly-charged monomer ions: direct filed-evaporation and post-ionisation.",

author = "L. Bischoff and W. Pilz and Th Ganetsos and Ch Akhmadaliev and Aidinis, \{C. J.\} and Londos, \{C. A.\}",

year = "2005",

month = jan,

day = "1",

doi = "10.1088/1742-6596/10/1/053",

language = "English",

volume = "10",

pages = "214--217",

journal = "Journal of Physics: Conference Series",

issn = "1742-6588",

publisher = "IOP Publishing Ltd.",

number = "1",

}

TY - JOUR

T1 - On the temperature dependence of the mass spectra of AuGe and AuGeSi liquid metal alloy ion sources

AU - Bischoff, L.

AU - Pilz, W.

AU - Ganetsos, Th

AU - Akhmadaliev, Ch

AU - Aidinis, C. J.

AU - Londos, C. A.

PY - 2005/1/1

Y1 - 2005/1/1

N2 - This reports on an extensive study of the characteristics of AuGe and AuGeSi liquid metal alloy ion sources as a model system for new semiconductor compatible FIB sources. Such characteristics include ion beam mass spectra. A careful investigation has been undertaken where the emitter temperature is the main variable parameter. This work concerns the temperature dependence of the mass spectra of two needle-type liquid metal alloy ion sources (LMAISs), namely Au77Ge14Si9 (Tm ≤ 364°C) and Au73Ge27 (Tm ≤ 365°C). The sources are important for producing SiGe implanted layers. The experimental results, in conjunction with existing theories, strongly points towards the co-existence of two mechanisms for the emission of doubly-charged monomer ions: direct filed-evaporation and post-ionisation.

AB - This reports on an extensive study of the characteristics of AuGe and AuGeSi liquid metal alloy ion sources as a model system for new semiconductor compatible FIB sources. Such characteristics include ion beam mass spectra. A careful investigation has been undertaken where the emitter temperature is the main variable parameter. This work concerns the temperature dependence of the mass spectra of two needle-type liquid metal alloy ion sources (LMAISs), namely Au77Ge14Si9 (Tm ≤ 364°C) and Au73Ge27 (Tm ≤ 365°C). The sources are important for producing SiGe implanted layers. The experimental results, in conjunction with existing theories, strongly points towards the co-existence of two mechanisms for the emission of doubly-charged monomer ions: direct filed-evaporation and post-ionisation.

UR - https://www.scopus.com/pages/publications/22544445886

U2 - 10.1088/1742-6596/10/1/053

DO - 10.1088/1742-6596/10/1/053

M3 - Article

AN - SCOPUS:22544445886

SN - 1742-6588

VL - 10

SP - 214

EP - 217

JO - Journal of Physics: Conference Series

JF - Journal of Physics: Conference Series

IS - 1

ER -

On the temperature dependence of the mass spectra of AuGe and AuGeSi liquid metal alloy ion sources

Abstract

Access to Document

Other files and links

Fingerprint

Cite this