Characteristics of erbium-ions-producing liquid metal ions sources

Th Ganetsos; G. L.R. Mair; C. J. Aidinis; L. Bischoff

doi:10.1016/j.physb.2003.09.093

Characteristics of erbium-ions-producing liquid metal ions sources

Th Ganetsos
, G. L.R. Mair
, C. J. Aidinis
, L. Bischoff

National and Kapodistrian University of Athens
Helmholtz-Zentrum Dresden-Rossendorf

Research output: Contribution to journal › Conference article › peer-review

7 Scopus citations

Abstract

Focused ion beams (FIBs) are of importance as direct write tools in the microelectronics industry, and beams containing Er ions are of importance for optoelectronics applications. Microstructures doped with Er are attractive because of their intra-4f transition of Er³⁺ at a wavelength of 1.54μm, which corresponds to the minimum of attenuation of optical wave-guides. We describe the electric characteristics and mass spectra of two liquid metal alloy ion sources; namely Er₇₀Fe₂₂Cr ₃Ni₅ and Er₆₉Ni₃₁. For the first time in the literature the energy spread of triply charged ions (Er ³⁺) is reported.

Original language	English
Pages (from-to)	1166-1170
Number of pages	5
Journal	Physica B: Condensed Matter
Volume	340-342
DOIs	https://doi.org/10.1016/j.physb.2003.09.093
State	Published - 31 Dec 2003
Externally published	Yes
Event	Proceedings of the 22nd International Conference on Defects in (ICDS-22) - Aarhus, Denmark Duration: 28 Jul 2003 → 1 Aug 2003

Keywords

Electric characteristics
Liquid metal ion sources
Microelectronics

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10.1016/j.physb.2003.09.093

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title = "Characteristics of erbium-ions-producing liquid metal ions sources",

abstract = "Focused ion beams (FIBs) are of importance as direct write tools in the microelectronics industry, and beams containing Er ions are of importance for optoelectronics applications. Microstructures doped with Er are attractive because of their intra-4f transition of Er3+ at a wavelength of 1.54μm, which corresponds to the minimum of attenuation of optical wave-guides. We describe the electric characteristics and mass spectra of two liquid metal alloy ion sources; namely Er70Fe22Cr 3Ni5 and Er69Ni31. For the first time in the literature the energy spread of triply charged ions (Er 3+) is reported.",

keywords = "Electric characteristics, Liquid metal ion sources, Microelectronics",

author = "Th Ganetsos and Mair, \{G. L.R.\} and Aidinis, \{C. J.\} and L. Bischoff",

year = "2003",

month = dec,

day = "31",

doi = "10.1016/j.physb.2003.09.093",

language = "English",

volume = "340-342",

pages = "1166--1170",

journal = "Physica B: Condensed Matter",

issn = "0921-4526",

publisher = "Elsevier B.V.",

note = "Proceedings of the 22nd International Conference on Defects in (ICDS-22) ; Conference date: 28-07-2003 Through 01-08-2003",

}

TY - JOUR

T1 - Characteristics of erbium-ions-producing liquid metal ions sources

AU - Ganetsos, Th

AU - Mair, G. L.R.

AU - Aidinis, C. J.

AU - Bischoff, L.

PY - 2003/12/31

Y1 - 2003/12/31

N2 - Focused ion beams (FIBs) are of importance as direct write tools in the microelectronics industry, and beams containing Er ions are of importance for optoelectronics applications. Microstructures doped with Er are attractive because of their intra-4f transition of Er3+ at a wavelength of 1.54μm, which corresponds to the minimum of attenuation of optical wave-guides. We describe the electric characteristics and mass spectra of two liquid metal alloy ion sources; namely Er70Fe22Cr 3Ni5 and Er69Ni31. For the first time in the literature the energy spread of triply charged ions (Er 3+) is reported.

AB - Focused ion beams (FIBs) are of importance as direct write tools in the microelectronics industry, and beams containing Er ions are of importance for optoelectronics applications. Microstructures doped with Er are attractive because of their intra-4f transition of Er3+ at a wavelength of 1.54μm, which corresponds to the minimum of attenuation of optical wave-guides. We describe the electric characteristics and mass spectra of two liquid metal alloy ion sources; namely Er70Fe22Cr 3Ni5 and Er69Ni31. For the first time in the literature the energy spread of triply charged ions (Er 3+) is reported.

KW - Electric characteristics

KW - Liquid metal ion sources

KW - Microelectronics

UR - https://www.scopus.com/pages/publications/0347946841

U2 - 10.1016/j.physb.2003.09.093

DO - 10.1016/j.physb.2003.09.093

M3 - Conference article

AN - SCOPUS:0347946841

SN - 0921-4526

VL - 340-342

SP - 1166

EP - 1170

JO - Physica B: Condensed Matter

JF - Physica B: Condensed Matter

T2 - Proceedings of the 22nd International Conference on Defects in (ICDS-22)

Y2 - 28 July 2003 through 1 August 2003

ER -

Characteristics of erbium-ions-producing liquid metal ions sources

Abstract

Keywords

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