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Analytical predictive modeling for the study of the scalability limits of multiple gate MOSFETs

  • Escola Tècnica Superior d'Enginyeria Química
  • LAAS / CNRS

Research output: Contribution to journalArticlepeer-review

18 Scopus citations

Abstract

We have developed analytical, models for the threshold voltage, the subthreshold swing and DIBL of undoped cylindrical Gate All Around (GAA) MOSFETs and Double Gate (DG) MOSFET using an analytical solution of the two-dimensional (2D) Poisson equation in which the mobile charge term has been considered. Using this new model, we have studied the scalability limits of GAA and DG MOSFETs and compared their performances. We have found that, to obtain a given performance, GAA MOSFETs can have a 33% shorter channel length than DG MOSFETs.

Original languageEnglish
Pages (from-to)414-422
Number of pages9
JournalSolid-State Electronics
Volume51
Issue number3
DOIs
StatePublished - Mar 2007
Externally publishedYes

Keywords

  • DIBL
  • Device modeling
  • Double Gate MOSFET
  • Gate All Around MOSFETs
  • Nanoscale semiconductor devices
  • Scaling rules
  • Subthreshold swing
  • Threshold voltage

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